Chime Polymers Private Limited

DuPont™ Kalrez® 8900For Semiconductor Oxidation, Diffusion, ALD, and LPCVD Applications

DuPont™ Kalrez® 8900 perfluoroelastomer parts are a black product for oxidation, diffusion, ALD, and LPCVD applications. It offers outstanding thermal stability, very low outgassing and excellent (low) compression set properties. Kalrez® 8900 parts exhibit excellent retention of physical properties at elevated temperatures, have excellent mechanical strength and are well-suited for both static and dynamic sealing applications. A maximum application temperature of 325°C (617°F) is suggested. Short excursions to higher temperatures may also be possible. Ultrapure post-cleaning and packaging is standard for all Kalrez® 8900 parts.

Kalrez® 7075UPPERFLUOROELASTOMER PARTS(FFKM)

DuPont™ Kalrez® 7075UP perfluoroelastomer parts are targeted specifically for metal CVD applications. They offer outstanding thermal stability, very low outgassing and excellent compression set properties. Kalrez® 7075UP exhibits excellent seal force retention, has good mechanical properties and is well suited for both static and dynamic sealing applications. Ultrapure post-cleaning and packaging is standard for all parts made from Kalrez® 7075UP.

DuPont™ Kalrez® 8575 For Semiconductor Processes 

DuPont™ Kalrez® 8575 perfluoroelastomer parts are a white product for “select” etch, ash/strip and deposition process applications. It offers very low weight loss in oxygen and fluorine-based plasmas, low outgassing, and excellent elastic recovery properties. Kalrez® 8575 has excellent vacuum and long-term sealing performance, good mechanical properties and is well-suited for both static and dynamic sealing applications (e.g., gas inlets, chamber lid seals, slit valve doors). A maximum continuous service temperature of 300 °C is suggested. Ultrapure post-cleaning and packaging is standard for all parts made of Kalrez® 8575.